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Foundations of MEMS /

Liu, Chang

Foundations of MEMS / Chang Liu - 2 ed. - xiv, 562 p. : il. ; 24 cm.

Incluye referencias bibliográficas e índice

ISBN: 0132497360 (alk. paper) 9780132497367 (alk. paper)

Subjects--Topical Terms:
SISTEMAS MICROELECTROMECANICOS
SISTEMAS MICROELECTROMECANICOS--MATERIALES

Dewey Class. No.: 621.381 / L58 2012

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