MARC details
| 000 -LEADER |
| fixed length control field |
03395nam a22004695i 4500 |
| 001 - CONTROL NUMBER |
| control field |
978-0-387-75109-2 |
| 003 - CONTROL NUMBER IDENTIFIER |
| control field |
DE-He213 |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
| control field |
20250710084021.0 |
| 007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION |
| fixed length control field |
cr nn 008mamaa |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
| fixed length control field |
100301s2008 xxu| s |||| 0|eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
| International Standard Book Number |
9780387751092 |
| -- |
99780387751092 |
| 024 7# - OTHER STANDARD IDENTIFIER |
| Standard number or code |
10.1007/978-0-387-75109-2 |
| Source of number or code |
doi |
| 082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER |
| Classification number |
620.44 |
| Edition information |
23 |
| 100 1# - MAIN ENTRY--PERSONAL NAME |
| Personal name |
Pelliccione, Matthew. |
| Relator term |
author. |
| 245 10 - TITLE STATEMENT |
| Title |
Evolution of Thin Film Morphology |
| Medium |
[recurso electrónico] : |
| Remainder of title |
Modeling and Simulations / |
| Statement of responsibility, etc. |
by Matthew Pelliccione, Toh-Ming Lu. |
| 264 #1 - PRODUCTION, PUBLICATION, DISTRIBUTION, MANUFACTURE, AND COPYRIGHT NOTICE |
| Place of production, publication, distribution, manufacture |
New York, NY : |
| Name of producer, publisher, distributor, manufacturer |
Springer New York, |
| Date of production, publication, distribution, manufacture, or copyright notice |
2008. |
| 300 ## - PHYSICAL DESCRIPTION |
| Extent |
XI, 206 p. |
| Other physical details |
online resource. |
| 336 ## - CONTENT TYPE |
| Content type term |
text |
| Content type code |
txt |
| Source |
rdacontent |
| 337 ## - MEDIA TYPE |
| Media type term |
computer |
| Media type code |
c |
| Source |
rdamedia |
| 338 ## - CARRIER TYPE |
| Carrier type term |
recurso en línea |
| Carrier type code |
cr |
| Source |
rdacarrier |
| 347 ## - DIGITAL FILE CHARACTERISTICS |
| File type |
text file |
| Encoding format |
PDF |
| Source |
rda |
| 490 1# - SERIES STATEMENT |
| Series statement |
Materials Science, |
| International Standard Serial Number |
0933-033X ; |
| Volume/sequential designation |
108 |
| 505 0# - FORMATTED CONTENTS NOTE |
| Formatted contents note |
Description of Thin Film Morphology -- Surface Statistics -- Self-Affine Surfaces -- Mounded Surfaces -- Continuum Surface Growth Models -- Stochastic Growth Equations -- Small World Growth Model -- Discrete Surface Growth Models -- Monte Carlo Simulations -- Solid-on-Solid Models -- Ballistic Aggregation Models -- Concluding Remarks. |
| 520 ## - SUMMARY, ETC. |
| Summary, etc. |
Thin film deposition is the most ubiquitous and critical of the processes used to manufacture high tech devices. Morphology and microstructure of thin films directly controls their optical, magnetic, and electrical properties. This book focuses on modeling and simulations used in research on the morphological evolution during film growth. The authors emphasize the detailed mathematical formulation of the problem both through numerical calculations based on Langevin continuum equations, and through Monte Carlo simulations based on discrete surface growth models when an analytical formulism is not convenient. Evolution of Thin-Film Morphology will be of benefit to university researchers and industrial scientists working in the areas of semiconductor processing, optical coating, plasma etching, patterning, micro-machining, polishing, tribology, and any discipline that requires an understanding of thin film growth processes. In particular, the reader will be introduced to the mathematical tools that are available to describe such a complex problem, and appreciate the utility of the various modeling methods through numerous example discussions. For beginners in the field, the text is written assuming a minimal background in mathematics and computer programming. The book will enable readers themselves to set up a computational program to investigate specific topics of interest in thin film deposition. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
| Topical term or geographic name entry element |
CHEMISTRY. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
| Topical term or geographic name entry element |
OPTICAL MATERIALS. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
| Topical term or geographic name entry element |
CHEMISTRY, INORGANIC. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
| Topical term or geographic name entry element |
SURFACES (PHYSICS). |
| 650 14 - SUBJECT ADDED ENTRY--TOPICAL TERM |
| Topical term or geographic name entry element |
CHEMISTRY. |
| 650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM |
| Topical term or geographic name entry element |
SURFACES AND INTERFACES, THIN FILMS. |
| 650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM |
| Topical term or geographic name entry element |
OPTICAL AND ELECTRONIC MATERIALS. |
| 650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM |
| Topical term or geographic name entry element |
TRIBOLOGY, CORROSION AND COATINGS. |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
| Personal name |
Lu, Toh-Ming. |
| Relator term |
author. |
| 710 2# - ADDED ENTRY--CORPORATE NAME |
| Corporate name or jurisdiction name as entry element |
SpringerLink (Online service) |
| 773 0# - HOST ITEM ENTRY |
| Title |
Springer eBooks |
| 776 08 - ADDITIONAL PHYSICAL FORM ENTRY |
| Relationship information |
Printed edition: |
| International Standard Book Number |
9780387751085 |
| 830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE |
| Uniform title |
Materials Science, |
| International Standard Serial Number |
0933-033X ; |
| Volume/sequential designation |
108 |
| 856 40 - ELECTRONIC LOCATION AND ACCESS |
| Uniform Resource Identifier |
<a href="http://dx.doi.org/10.1007/978-0-387-75109-2">http://dx.doi.org/10.1007/978-0-387-75109-2</a> |
| Public note |
Ver el texto completo en las instalaciones del CICY |
| 912 ## - |
| -- |
ZDB-2-CMS |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
| Source of classification or shelving scheme |
Dewey Decimal Classification |
| Koha item type |
Libros electrónicos |