MARC details
| 000 -LEADER |
| fixed length control field |
03333nam a22004815i 4500 |
| 001 - CONTROL NUMBER |
| control field |
978-0-387-76534-1 |
| 003 - CONTROL NUMBER IDENTIFIER |
| control field |
DE-He213 |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
| control field |
20250710084024.0 |
| 007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION |
| fixed length control field |
cr nn 008mamaa |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
| fixed length control field |
100301s2008 xxu| s |||| 0|eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
| International Standard Book Number |
9780387765341 |
| -- |
99780387765341 |
| 024 7# - OTHER STANDARD IDENTIFIER |
| Standard number or code |
10.1007/978-0-387-76534-1 |
| Source of number or code |
doi |
| 100 1# - MAIN ENTRY--PERSONAL NAME |
| Personal name |
Tan, Chuan Seng. |
| Relator term |
editor. |
| 245 10 - TITLE STATEMENT |
| Title |
Wafer Level 3-D ICs Process Technology |
| Medium |
[recurso electrónico] / |
| Statement of responsibility, etc. |
edited by Chuan Seng Tan, Ronald J. Gutmann, L. Rafael Reif. |
| 264 #1 - PRODUCTION, PUBLICATION, DISTRIBUTION, MANUFACTURE, AND COPYRIGHT NOTICE |
| Place of production, publication, distribution, manufacture |
Boston, MA : |
| Name of producer, publisher, distributor, manufacturer |
Springer US, |
| Date of production, publication, distribution, manufacture, or copyright notice |
2008. |
| 300 ## - PHYSICAL DESCRIPTION |
| Extent |
XII, 410p. |
| Other physical details |
online resource. |
| 336 ## - CONTENT TYPE |
| Content type term |
text |
| Content type code |
txt |
| Source |
rdacontent |
| 337 ## - MEDIA TYPE |
| Media type term |
computer |
| Media type code |
c |
| Source |
rdamedia |
| 338 ## - CARRIER TYPE |
| Carrier type term |
recurso en línea |
| Carrier type code |
cr |
| Source |
rdacarrier |
| 347 ## - DIGITAL FILE CHARACTERISTICS |
| File type |
text file |
| Encoding format |
PDF |
| Source |
rda |
| 490 1# - SERIES STATEMENT |
| Series statement |
Integrated Circuits and Systems, |
| International Standard Serial Number |
1558-9412 |
| 505 0# - FORMATTED CONTENTS NOTE |
| Formatted contents note |
Overview of Wafer-Level 3D ICs -- Monolithic 3D Integrated Circuits -- Stacked CMOS Technologies -- Wafer-Bonding Technologies and Strategies for 3D ICs -- Through-Silicon Via Fabrication, Backgrind, and Handle Wafer Technologies -- Cu Wafer Bonding for 3D IC Applications -- Cu/Sn Solid-Liquid Interdiffusion Bonding -- An SOI-Based 3D Circuit Integration Technology -- 3D Fabrication Options for High-Performance CMOS Technology -- 3D Integration Based upon Dielectric Adhesive Bonding -- Direct Hybrid Bonding -- 3D Memory -- Circuit Architectures for 3D Integration -- Thermal Challenges of 3D ICs -- Status and Outlook. |
| 520 ## - SUMMARY, ETC. |
| Summary, etc. |
Wafer Level 3-D ICs Process Technology focuses on foundry-based process technology that enables the fabrication of 3-D ICs. The core of the book discusses alternative technology platforms for pre-packaging wafer level 3-D ICs, with an emphasis on wafer-to-wafer stacking. Driven by the need for improved performance, a number of companies, consortia and universities are researching methods to use short, monolithically-fabricated, vertical interconnections to replace the long interconnects found in 2-D ICs. Stacking disparate technologies to provide various combinations of densely-packed functions, such as logic, memory, MEMS, displays, RF, mixed-signal, sensors, and power delivery is potentially possible with 3-D heterogeneous integration, making this technology the "Holy Grail" of system integration. Wafer Level 3-D ICs Process Technology is an edited book based on chapters contributed by various experts in the fields of wafer-level 3-D ICs process technology and applications enabled by 3-D integration. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
| Topical term or geographic name entry element |
ENGINEERING. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
| Topical term or geographic name entry element |
ELECTRONICS. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
| Topical term or geographic name entry element |
OPTICAL MATERIALS. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
| Topical term or geographic name entry element |
SURFACES (PHYSICS). |
| 650 14 - SUBJECT ADDED ENTRY--TOPICAL TERM |
| Topical term or geographic name entry element |
ENGINEERING. |
| 650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM |
| Topical term or geographic name entry element |
ELECTRONICS AND MICROELECTRONICS, INSTRUMENTATION. |
| 650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM |
| Topical term or geographic name entry element |
OPTICAL AND ELECTRONIC MATERIALS. |
| 650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM |
| Topical term or geographic name entry element |
SURFACES AND INTERFACES, THIN FILMS. |
| 650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM |
| Topical term or geographic name entry element |
ENGINEERING, GENERAL. |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
| Personal name |
Gutmann, Ronald J. |
| Relator term |
editor. |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
| Personal name |
Reif, L. Rafael. |
| Relator term |
editor. |
| 710 2# - ADDED ENTRY--CORPORATE NAME |
| Corporate name or jurisdiction name as entry element |
SpringerLink (Online service) |
| 773 0# - HOST ITEM ENTRY |
| Title |
Springer eBooks |
| 776 08 - ADDITIONAL PHYSICAL FORM ENTRY |
| Relationship information |
Printed edition: |
| International Standard Book Number |
9780387765327 |
| 830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE |
| Uniform title |
Integrated Circuits and Systems, |
| International Standard Serial Number |
1558-9412 |
| 856 40 - ELECTRONIC LOCATION AND ACCESS |
| Uniform Resource Identifier |
<a href="http://dx.doi.org/10.1007/978-0-387-76534-1">http://dx.doi.org/10.1007/978-0-387-76534-1</a> |
| Public note |
Ver el texto completo en las instalaciones del CICY |
| 912 ## - |
| -- |
ZDB-2-ENG |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
| Source of classification or shelving scheme |
Dewey Decimal Classification |
| Koha item type |
Libros electrónicos |