Multi-Wafer Rotating MEMS Machines (Record no. 59014)

MARC details
000 -LEADER
fixed length control field 04003nam a22005055i 4500
001 - CONTROL NUMBER
control field 978-0-387-77747-4
003 - CONTROL NUMBER IDENTIFIER
control field DE-He213
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20251006084416.0
007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION
fixed length control field cr nn 008mamaa
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 100301s2010 xxu| s |||| 0|eng d
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9780387777474
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 99780387777474
024 7# - OTHER STANDARD IDENTIFIER
Standard number or code 10.1007/978-0-387-77747-4
Source of number or code doi
082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.381
Edition information 23
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name Lang, Jeffrey.
Relator term editor.
245 10 - TITLE STATEMENT
Title Multi-Wafer Rotating MEMS Machines
Medium [electronic resource] :
Remainder of title Turbines, Generators, and Engines /
Statement of responsibility, etc. edited by Jeffrey Lang.
264 #1 - PRODUCTION, PUBLICATION, DISTRIBUTION, MANUFACTURE, AND COPYRIGHT NOTICE
Place of production, publication, distribution, manufacture Boston, MA :
Name of producer, publisher, distributor, manufacturer Springer US :
-- Imprint: Springer,
Date of production, publication, distribution, manufacture, or copyright notice 2010.
300 ## - PHYSICAL DESCRIPTION
Extent XIV, 454p. 604 illus., 302 illus. in color.
Other physical details online resource.
336 ## - CONTENT TYPE
Content type term text
Content type code txt
Source rdacontent
337 ## - MEDIA TYPE
Media type term computer
Media type code c
Source rdamedia
338 ## - CARRIER TYPE
Carrier type term online resource
Carrier type code cr
Source rdacarrier
347 ## - DIGITAL FILE CHARACTERISTICS
File type text file
Encoding format PDF
Source rda
490 1# - SERIES STATEMENT
Series statement MEMS Reference Shelf,
International Standard Serial Number 1936-4407
505 0# - FORMATTED CONTENTS NOTE
Formatted contents note to PowerMEMS -- System Design Considerations and Device Overview -- Materials, Structures and Packaging -- Microengine Fabrication -- Fabrication of Microscale Rotating Magnetic Machines -- High-Speed Gas Bearings for Micro-Turbomachinery -- Thermofluidics and Turbomachinery -- Motors and Generators -- Microcombustors for Rotating Machinery.
520 ## - SUMMARY, ETC.
Summary, etc. Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines is an outgrowth of the MIT Micro Engine Project. This project began at the Massachusetts Institute of Technology in the Fall of 1995, and later expanded through collaborations with the Georgia Institute of Technology, the Clark Atlanta University, and the University of Maryland at College Park. The overall objective of the Micro Engine Project was to develop a small but power-dense gas turbine generator based on MEMS fabrication technologies. Thus, the project sought to develop a fuel-burning jet engine that would drive an electric generator to produce electric power for general purpose use. Along the way, the project would advance the science and engineering of many disciplines from the MEMS perspective. The Micro Engine Project was by its very nature a highly mult-disciplinary project pursuing advances in materials, structures, fabrication, combustion, heat transfer, turbomachinery, bearings and electromechanics, all at the MEMS scale. Many of these topics are addressed in this volume, including: materials structures and packaging multi-wafer MEMS fabrication and and bonding technologiesElectroplating magnetic components electroplating magnetic structures into silicon very-high-speed air bearings thermofluids and turbomachinery electric and magnetic generators combustion About The MEMs Reference Shelf: "The MEMs Reference Shelf is a series devoted to Micro-Electro-Mechanical Systems (MEMs) which combine mechanical, electrical, optical, or fluidic elements on a common microfabricated substrate to create sensors, actuators, and microsystems. The series, authored by leading MEMs practitioners, strives to provide a framework where basic principles, known methodologies and new applications are integrated in a coherent and consistent manner." STEPHEN D. SENTURIA Massachusetts Institute of Technology, Professor of Electrical Engineering, Emeritus
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element ENGINEERING.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element COMPUTER ENGINEERING.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element ELECTRONICS.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element SYSTEMS ENGINEERING.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element ELECTRIC ENGINEERING.
650 14 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element ENGINEERING.
650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element ELECTRONICS AND MICROELECTRONICS, INSTRUMENTATION.
650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element ENERGY TECHNOLOGY.
650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element CIRCUITS AND SYSTEMS.
650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element ELECTRICAL ENGINEERING.
650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element ENERGY, GENERAL.
710 2# - ADDED ENTRY--CORPORATE NAME
Corporate name or jurisdiction name as entry element SpringerLink (Online service)
773 0# - HOST ITEM ENTRY
Title Springer eBooks
776 08 - ADDITIONAL PHYSICAL FORM ENTRY
Relationship information Printed edition:
International Standard Book Number 9780387777467
830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE
Uniform title MEMS Reference Shelf,
International Standard Serial Number 1936-4407
856 40 - ELECTRONIC LOCATION AND ACCESS
Uniform Resource Identifier <a href="http://dx.doi.org/10.1007/978-0-387-77747-4">http://dx.doi.org/10.1007/978-0-387-77747-4</a>
Public note Ver el texto completo en las instalaciones del CICY
912 ## -
-- ZDB-2-ENG
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Source of classification or shelving scheme Dewey Decimal Classification
Koha item type Libros electrónicos
Holdings
Lost status Source of classification or shelving scheme Damaged status Not for loan Collection Home library Current library Shelving location Date acquired Total checkouts Full call number Date last seen Price effective from Koha item type
  Dewey Decimal Classification     Libro electrónico CICY CICY Libro electrónico 06.10.2025   621.381 06.10.2025 06.10.2025 Libros electrónicos