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Feasibility of X-ray fluorescence imaging in a SEM using pinhole relay optics

Tipo de material: TextoTextoSeries ; The European Physical Journal - Applied Physics, 14(2), p.143-146, 2001Trabajos contenidos:
  • Erre, D
  • Jibaoui, H
  • Rondot, S
  • Mouze, D
Recursos en línea: Resumen: The feasibility of imaging by X-ray fluorescence in a SEM has been tested on a simple laboratory set-up. It has been demonstrated that images generated by the fluorescent X-rays can be directly obtained with the use of simple pinhole relay optics and an incident X-ray beam created in a SEM. These images were acquired with a charge coupled device (CCD)camera coupled to a phosphor screen by a fibre-optic faceplate. This technique provides chemical and topographical images with a spatial resolution in the object plane of a few micrometres. This "global"imaging has the advantage that the acquisition time is only a few minutes for a sample surface of a few mm2.
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The feasibility of imaging by X-ray fluorescence in a SEM has been tested on a simple laboratory set-up. It has been demonstrated that images generated by the fluorescent X-rays can be directly obtained with the use of simple pinhole relay optics and an incident X-ray beam created in a SEM. These images were acquired with a charge coupled device (CCD)camera coupled to a phosphor screen by a fibre-optic faceplate. This technique provides chemical and topographical images with a spatial resolution in the object plane of a few micrometres. This "global"imaging has the advantage that the acquisition time is only a few minutes for a sample surface of a few mm2.

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