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Verification of FEM analysis of load-deflection methods for measuring mechanical properties of thin films

Tipo de material: TextoTextoSeries ; Microsyst. Technol. Lab., MIT, Cambridge, MA Solid-State Sensor and Actuator Workshop, 1990. 4th Technical Digest., IEEE, p.70-73, 1990Trabajos contenidos:
  • Pan, J.Y
  • Lin, P
  • Maseeh, F
  • Senturia, S.D
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Item type Current library Collection Call number Status Date due Barcode
Documentos solicitados Documentos solicitados CICY Documento préstamo interbibliotecario Ref1 B-12565 (Browse shelf(Opens below)) Available

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