Influence of residual stresses on the mechanical properties of TiCxN1-x (x= 0, 0.15, 0.45) thin films deposited by arc evaporation 

 -  Thin Solid Films, 371(1-2), p.167-177, 2000 .
<br/><br/><label>Subjects--Topical Terms: </label><br/>RESIDUAL STRESS<br/>THIN FILMS<br/>ARC EVAPORATION<br/>TITANIUM CARBONITRIDE<br/>HARDNESS