TY  - BOOK
AU  - Pan,J.Y.
AU  - Lin,P.
AU  - Maseeh,F.
AU  - Senturia,S.D
TI  - Verification of FEM analysis of load-deflection methods for measuring mechanical properties of thin films
UR  - https://drive.google.com/file/d/1rdRMZUZ8cC4Jy_K-kragQbuXxlk0rTMY/view?usp=drivesdk
ER  -