TY  - BOOK
AU  - Satou,H.
AU  - Suzuki,H.
AU  - Makino,D.
TI  - Polyimides for semiconductor applications
KW  - PASSIVATION FILM
KW  - BREAKDOWN VOLTAGE
KW  - SODIUM LAURYL SULFATE
KW  - POLYIMIDE FILM
KW  - POLYAMIC ACID
N2  - A wide variety of polymeric materials are used in the manufacture of semiconductor devices. Examples include polymers for use as photoresists in microfabrication and epoxy moulding compounds used in electronic packaging
UR  - https://drive.google.com/file/d/1wWAzTNoRmK2WpAjkXPi8XTF6DaavOjjI/view?usp=drivesdk
ER  -