TY - BOOK AU - Dasilva,W. AU - Entenberg,A. AU - Kahn,B. AU - Debies,T. AU - Takacs,G.A. TI - Surface modification of TeflonĀ® PFA with vacuum UV photo-oxidation KW - SURFACE MODIFICATION KW - TEFLON+ KW - PFA KW - COPPER, VUV KW - PHOTO-OXIDATION KW - COHESIVE FAILURE KW - ADHESION KW - AR MICROWAVE PLASMA N2 - Surface modification of poly(tetrafluoroethylene-co-perfluoropropyl vinyl ether)(PFA)with vacuum UV (VUV)photo-oxidation using radiation from excited Ar atoms downstream from an Ar microwave (MW)plasma shows: (1)an improvement in wettability as observed by water contactangle measurements; (2)surface roughening; (3)incorporation of oxygen as C=O, CF-O-CF2 and CF2-O-CF2 moieties and (4)enhancement of the CF-O-C n F2n+1 concentration. Adhesion measurements of Cu sputter coated onto the photo-oxidized PFA surface results in failure within the PFA (cohesive failure)and not at the Cu-PFA interface UR - https://drive.google.com/file/d/11prriUmMBC_sv-lPx_SyMvkee4gbbE1W/view?usp=drivesdk ER -