TY - BOOK AU - Santos,Héctor J. ED - SpringerLink (Online service) TI - Principles and Applications of NanoMEMS Physics T2 - Microsystems, SN - 9780387258348 PY - 2005/// CY - Boston, MA PB - Springer US KW - CHEMISTRY KW - LASER PHYSICS KW - QUANTUM OPTICS KW - OPTICAL MATERIALS KW - NANOTECHNOLOGY KW - OPTICAL AND ELECTRONIC MATERIALS KW - ELECTRONIC AND COMPUTER ENGINEERING KW - LASER TECHNOLOGY AND PHYSICS, PHOTONICS KW - QUANTUM OPTICS, QUANTUM ELECTRONICS, NONLINEAR OPTICS N1 - Nanoelectromechanical Systems -- Nanomes Physics: Quantum Wave-Particle Phenomena -- Nanomems Physics: Quantum Wave Phenomena -- Nanomems Applications: Circuits and Systems -- Nanomems Applications: Photonics N2 - Principles and Applications of NanoMEMS Physics presents the first unified exposition of the physical principles at the heart of NanoMEMS-based devices and applications. In particular, after beginning with a comprehensive presentation of the fundamentals and limitations of nanotechnology and MEMS fabrication techniques, the book addresses the physics germane to this dimensional regime, namely, quantum wave-particle phenomena, including, the manifestation of charge discreteness, quantized electrostatic actuation, and the Casimir effect, and quantum wave phenomena, including, quantized electrical conductance, quantum interference, Luttinger liquids, quantum entanglement, superconductivity and cavity quantum electrodynamics. Potential building blocks are also addressed for NanoMEMS applications, including, nanoelectromechanical quantum circuits and systems such as charge detectors, the which-path electron interferometer, and the Casimir oscillator, as well as a number of quantum computing implementation paradigms. Finally, NanoMEMS applications in photonics are addressed, including nanophotonic light sources and plasmonic devices UR - http://dx.doi.org/10.1007/b136228 ER -