TY  - BOOK
AU  - Lobontiu,Nicolae
ED  - SpringerLink (Online service)
TI  - Dynamics of Microelectromechanical Systems
T2  - Microsystems,
SN  - 9780387681955
U1  - 621.381 23
PY  - 2007///
CY  - Boston, MA
PB  - Springer US
KW  - ENGINEERING
KW  - COMPUTER AIDED DESIGN
KW  - MECHANICAL ENGINEERING
KW  - ELECTRONICS
KW  - SYSTEMS ENGINEERING
KW  - NANOTECHNOLOGY
KW  - ELECTRONICS AND MICROELECTRONICS, INSTRUMENTATION
KW  - CIRCUITS AND SYSTEMS
KW  - COMPUTER-AIDED ENGINEERING (CAD, CAE) AND DESIGN
N1  - Microcantilevers and Microbridges: Bending and Torsion Resonant Frequencies -- Micromechanical Systems: Modal Analysis -- Energy Losses in MEMS and Equivalent Viscous Damping -- Frequency and Time Response of MEMS
N2  - This work presents a systematic view of the dynamics of MEMS (microelectromechanical systems), microstructures, and their responses. The focus is on the mecahnical/structural micro domain and the compliant nature of mechanical transmission. Features of this work include: An in-depth treatment of problems that involve reliable modeling, analysis and design, Analytical models with correct dependences on service dimensions, Cantilever based systems for nanofabrication researchers and designers, and Dynamics of complex spring and beam microsystems. Although not designed for a specific course, this material could be used as a text at the upper-undergraduate/graduate level, and, as such, it contains numerous fully-solved examples as well as many end-of-the-chapter proposed problems. This is a follow up to the book, Mechanics of Microelectromechanical Systems, by Lobontiu and Garcia (Springer 2004), but the material in this new book is self-contained. Dynamics of Microelectromechanical Systems is a timely text and reference for microstructural engineers, microengineers, and MEMS specialists
UR  - http://dx.doi.org/10.1007/978-0-387-68195-5
ER  -