TY - BOOK AU - Cui,Zheng ED - SpringerLink (Online service) TI - Nanofabrication: Principles, Capabilities and Limits SN - 9780387755779 U1 - 620.115 23 PY - 2008/// CY - Boston, MA PB - Springer US KW - MATERIALS KW - OPTICAL MATERIALS KW - NANOTECHNOLOGY KW - MATERIALS SCIENCE KW - MATERIALS SCIENCE, GENERAL KW - CONTINUUM MECHANICS AND MECHANICS OF MATERIALS KW - OPTICAL AND ELECTRONIC MATERIALS N1 - Nanofabrication by Photons -- Nanofabrication by Charged Beams -- Nanofabrication by Scanning Probes -- Nanofabrication by Replication -- Nanoscale Pattern Transfer -- Indirect Nanofabrication -- Nanofabrication by Self-Assembly N2 - Nanofabrication: Principles, Capabilities and Limits presents a one-stop description at the introductory level on most technologies that have been developed which are capable of making structures below 100nm. Principles of each technology are introduced and illustrated with minimum mathematics involved. The capabilities of each technology in making sub-100nm structures are described. The limits of preventing a technology from further going down the dimensional scale are analyzed. Drawing upon years of practical experience and using numerous examples, Zheng Cui covers state-of-the art technologies in nanofabrication including: Photon-based lithography Charged particle beams lithography Nanofabrication using scanning probes Nanoscale replication Nanoscale pattern transfer Indirect nanofabrication Nanofabrication by self-assembly Nanofabrication: Principles, Capabilities and Limits will serve as a practical guide and first-hand reference for researchers and practitioners working in nanostructure fabrication and also provides a "tool box" of various techniques that can be easily adapted in different fields of applications. Written for: Nanoscience and nanotechnology researchers and engineers, technical professionals and academic researchers in the fields of electrtonics, mechanical engineering, and chemical engineering UR - http://dx.doi.org/10.1007/978-0-387-75577-9 ER -