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Polyimides for semiconductor applications

Tipo de material: TextoTextoSeries ; In Polyimides, p.227-251, 1990Trabajos contenidos:
  • Satou, H
  • Suzuki, H
  • Makino, D
Tema(s): Recursos en línea: Resumen: A wide variety of polymeric materials are used in the manufacture of semiconductor devices. Examples include polymers for use as photoresists in microfabrication and epoxy moulding compounds used in electronic packaging.
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Documentos solicitados Documentos solicitados CICY Documento préstamo interbibliotecario Ref1 B-18109 (Browse shelf(Opens below)) Available

A wide variety of polymeric materials are used in the manufacture of semiconductor devices. Examples include polymers for use as photoresists in microfabrication and epoxy moulding compounds used in electronic packaging.

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