| 000 | 00779nam a2200193Ia 4500 | ||
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| 003 | MX-MdCICY | ||
| 005 | 20250625153858.0 | ||
| 040 | _cCICY | ||
| 090 | _aB-12565 | ||
| 245 | 1 | 0 | _aVerification of FEM analysis of load-deflection methods for measuring mechanical properties of thin films |
| 490 | 0 | _vMicrosyst. Technol. Lab., MIT, Cambridge, MA Solid-State Sensor and Actuator Workshop, 1990. 4th Technical Digest., IEEE, p.70-73, 1990 | |
| 700 | 1 | 2 | _aPan, J.Y. |
| 700 | 1 | 2 | _aLin, P. |
| 700 | 1 | 2 | _aMaseeh, F. |
| 700 | 1 | 2 | _aSenturia, S.D |
| 856 | 4 | 0 |
_uhttps://drive.google.com/file/d/1rdRMZUZ8cC4Jy_K-kragQbuXxlk0rTMY/view?usp=drivesdk _zPara ver el documento ingresa a Google con tu cuenta: @cicy.edu.mx |
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