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090 _aB-12565
245 1 0 _aVerification of FEM analysis of load-deflection methods for measuring mechanical properties of thin films
490 0 _vMicrosyst. Technol. Lab., MIT, Cambridge, MA Solid-State Sensor and Actuator Workshop, 1990. 4th Technical Digest., IEEE, p.70-73, 1990
700 1 2 _aPan, J.Y.
700 1 2 _aLin, P.
700 1 2 _aMaseeh, F.
700 1 2 _aSenturia, S.D
856 4 0 _uhttps://drive.google.com/file/d/1rdRMZUZ8cC4Jy_K-kragQbuXxlk0rTMY/view?usp=drivesdk
_zPara ver el documento ingresa a Google con tu cuenta: @cicy.edu.mx
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