| 000 | 02466nam a22003975i 4500 | ||
|---|---|---|---|
| 001 | 978-0-387-23037-5 | ||
| 003 | DE-He213 | ||
| 005 | 20250710083927.0 | ||
| 007 | cr nn 008mamaa | ||
| 008 | 100301s2005 xxu| s |||| 0|eng d | ||
| 020 |
_a9780387230375 _a99780387230375 |
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| 024 | 7 |
_a10.1007/b100026 _2doi |
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| 082 | 0 | 4 |
_a621 _223 |
| 100 | 1 |
_aLobontiu, Nicolae. _eauthor. |
|
| 245 | 1 | 0 |
_aMechanics of Microelectromechanical Systems _h[recurso electrónico] / _cby Nicolae Lobontiu, Ephrahim Garcia. |
| 264 | 1 |
_aBoston, MA : _bSpringer US, _c2005. |
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| 300 |
_aXI, 425 p. _bonline resource. |
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| 336 |
_atext _btxt _2rdacontent |
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| 337 |
_acomputer _bc _2rdamedia |
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| 338 |
_arecurso en línea _bcr _2rdacarrier |
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| 347 |
_atext file _bPDF _2rda |
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| 505 | 0 | _aStiffness Basics -- Microcantilevers, Microhinges, Microbridges -- Microsuspensions -- Microtransduction: Actuation and Sensing -- Static Response of Mems -- Microfabrication, Materials, Precision and Scaling. | |
| 520 | _aThis book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer's viewpoint as devices that transform an input form of energy into output mechanical motion (in the case of actuation) or that can operate with the reversed functionality (as in sensors) and convert an external stimulus, such as mechanical motion, into (generally) electric energy. The impetus of this proposal stems from the perception that such an approach might contribute to a more solid understanding of the principles governing the mechanics of MEMS, and would hopefully enhance the efficiency of modeling and designing reliable and desirably-optimized microsystems. The work represents an attempt at both extending and deepening the mechanical-based approach to MEMS in the static domain by providing simple, yet reliable tools that are applicable to micromechanism design through current fabrication technologies. | ||
| 650 | 0 | _aENGINEERING. | |
| 650 | 0 | _aMECHANICAL ENGINEERING. | |
| 650 | 1 | 4 | _aENGINEERING. |
| 650 | 2 | 4 | _aMECHANICAL ENGINEERING. |
| 700 | 1 |
_aGarcia, Ephrahim. _eauthor. |
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| 710 | 2 | _aSpringerLink (Online service) | |
| 773 | 0 | _tSpringer eBooks | |
| 776 | 0 | 8 |
_iPrinted edition: _z9781402080135 |
| 856 | 4 | 0 |
_uhttp://dx.doi.org/10.1007/b100026 _zVer el texto completo en las instalaciones del CICY |
| 912 | _aZDB-2-ENG | ||
| 942 |
_2ddc _cER |
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| 999 |
_c56128 _d56128 |
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