000			04723nam a22004695i 4500
001			978-0-387-23313-0
003			DE-He213
005			20250710083928.0
007			cr nn 008mamaa
008			100301s2005 xxu| s |||| 0|eng d
020			_a9780387233130 _a99780387233130
024	7		_a10.1007/b101190 _2doi
082	0	4	_a530.41 _223
100	1		_aGiannuzzi, Lucille A. _eeditor.
245	1	0	_aIntroduction to Focused Ion Beams _h[recurso electrónico] : _bInstrumentation, Theory, Techniques and Practice / _cedited by Lucille A. Giannuzzi, Fred A. Stevie.
264		1	_aBoston, MA : _bSpringer US, _c2005.
300			_aXVIII, 358 p. _bonline resource.
336			_atext _btxt _2rdacontent
337			_acomputer _bc _2rdamedia
338			_arecurso en línea _bcr _2rdacarrier
347			_atext file _bPDF _2rda
505	0		_aThe Focused Ion Beam Instrument -- Ion - Solid Interactions -- Focused Ion Beam Gases for Deposition and Enhanced Etch -- Three-Dimensional Nanofabrication Using Focused Ion Beams -- Device Edits and Modifications -- The Uses of Dual Beam FIB in Microelectronic Failure Analysis -- High Resolution Live Imaging of FIB Milling Processes for Optimum Accuracy -- FIB for Materials Science Applications - a Review -- Practical Aspects of FIB Tem Specimen Preparation -- FIB Lift-Out Specimen Preparation Techniques -- A FIB Micro-Sampling Technique and a Site Specific TEM Specimen Preparation Method -- Dual-Beam (FIB-SEM) Systems -- Focused Ion Beam Secondary Ion Mass Spectrometry (FIB-SIMS) -- Quantitative Three-Dimensional Analysis Using Focused Ion Beam Microscopy -- Application of FIB in Combination with Auger Electron Spectroscopy.
520			_aThe focused ion beam (FIB) instrument has experienced an intensive period of maturation since its inception. Numerous new techniques and applications have been brought to fruition, and over the past few years, the FIB has gained acceptance as more than just an expensive sample preparation tool. It has taken its place among the suite of other instruments commonly available in analytical and forensic laboratories, universities, geological, medical and biological research institutions, and manufacturing plants. Although the utility of the FIB is not limited to the preparation of specimens for subsequent analysis by other analytical techniques, it has revolutionized the area of TEM specimen preparation. The FIB has also been used to prepare samples for numerous other analytical techniques, and offers a wide range of other capabilities. While the mainstream of FIB usage remains within the semiconductor industry, FIB usage has expanded to applications in metallurgy, ceramics, composites, polymers, geology, art, biology, pharmaceuticals, forensics, and other disciplines. Computer automated procedures have been configured for unattended use of FIB and dual platform instruments. New applications of FIB and dual platform instrumentation are constantly being developed for materials characterization and nanotechnology. The site specific nature of the FIB milling and deposition capabilities allows preparation and processing of materials in ways that are limited only by one's imagination. Introduction to Focused Ion Beams is geared towards techniques and applications. The first portion of this book introduces the basics of FIB instrumentation, milling, and deposition capabilities. The chapter dedicated to ion-solid interactions is presented so that the FIB user can understand which parameters will influence FIB milling behavior. The remainder of the book focuses on how to prepare and analyze samples using FIB and related tools, and presents specific applications and techniques of the uses of FIB milling, deposition, and dual platform techniques. This is the only text that discusses and presents the theory directly related to applications and the only one that discusses the vast applications and techniques used in FIBs and Dual platform instruments.
650		0	_aPHYSICS.
650		0	_aCONDENSED MATTER.
650		0	_aPARTICLES (NUCLEAR PHYSICS).
650		0	_aOPTICAL MATERIALS.
650		0	_aSURFACES (PHYSICS).
650	1	4	_aPHYSICS.
650	2	4	_aCONDENSED MATTER.
650	2	4	_aSURFACES AND INTERFACES, THIN FILMS.
650	2	4	_aOPTICAL AND ELECTRONIC MATERIALS.
650	2	4	_aSOLID STATE PHYSICS AND SPECTROSCOPY.
700	1		_aStevie, Fred A. _eeditor.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
776	0	8	_iPrinted edition: _z9780387231167
856	4	0	_uhttp://dx.doi.org/10.1007/b101190 _zVer el texto completo en las instalaciones del CICY
912			_aZDB-2-PHA
942			_2ddc _cER
999			_c56174 _d56174