000			02932nam a22004335i 4500
001			978-0-387-26132-4
003			DE-He213
005			20250710083935.0
007			cr nn 008mamaa
008			100301s2007 xxu| s |||| 0|eng d
020			_a9780387261324 _a99780387261324
024	7		_a10.1007/b136902 _2doi
082	0	4	_a621 _223
100	1		_aJackson, Mark J. _eauthor.
245	1	0	_aMicro and Nanomanufacturing _h[recurso electrónico] / _cby Mark J. Jackson.
264		1	_aBoston, MA : _bSpringer US, _c2007.
300			_aX, 699 p. _bonline resource.
336			_atext _btxt _2rdacontent
337			_acomputer _bc _2rdamedia
338			_arecurso en línea _bcr _2rdacarrier
347			_atext file _bPDF _2rda
505	0		_aPrinciples of Micro- and Nanofabrication -- Microfabrication Using X- ray Lithography -- Manufacturing High Aspect Ratio Microstructures -- Meso-Micromachining -- Mechanical Micromachining -- Microgrinding -- Diamond Microcutting Tools -- Laser Micro- and Nanofabrication -- Micromachining Using Pulsed Water Droplets -- Diamond Nanogrinding -- Nanomachining -- Micro-and Nanomanufacturing.
520			_aNanofabrication and nanotechnology present a great challenge to engineers and researchers as they manipulate atoms and molecules to produce single artifacts and submicron components/systems. Micro and Nanomanufacturing provides a comprehensive treatment of established micro & nano fabrication techniques and addresses the needs of practicing manufacturing engineers by applying established and research laboratory manufacturing techniques to a wide variety of materials. Engineers seeking more knowledge of how nano and micro devices are designed and fabricated will learn: Manufacturing and fabrication at the micro and nanoscales Using bulk and surface micromachining techniques, LiGA and deep x-ray lithography to manufacture semiconductors Producing master molds with micromachining The deposition of thin films, pulsed water drop machining, and nanomachining Mark J. Jackson is an Associate Professor in the Department of Mechanical Engineering Technology at Purdue University. His current research focuses on understanding the properties of materials in the field of micro scale metal cutting, micro and nano abrasive machining, and laser micro machining.
650		0	_aENGINEERING.
650		0	_aMECHANICAL ENGINEERING.
650		0	_aMACHINERY.
650		0	_aELECTRONICS.
650	1	4	_aENGINEERING.
650	2	4	_aMECHANICAL ENGINEERING.
650	2	4	_aELECTRONICS AND MICROELECTRONICS, INSTRUMENTATION.
650	2	4	_aMANUFACTURING, MACHINES, TOOLS.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
776	0	8	_iPrinted edition: _z9780387258744
856	4	0	_uhttp://dx.doi.org/10.1007/b136902 _zVer el texto completo en las instalaciones del CICY
912			_aZDB-2-ENG
942			_2ddc _cER
999			_c56533 _d56533