000 03005nam a22004335i 4500
001 978-0-387-75577-9
003 DE-He213
005 20250710084022.0
007 cr nn 008mamaa
008 100301s2008 xxu| s |||| 0|eng d
020 _a9780387755779
_a99780387755779
024 7 _a10.1007/978-0-387-75577-9
_2doi
082 0 4 _a620.115
_223
100 1 _aCui, Zheng.
_eauthor.
245 1 0 _aNanofabrication
_h[recurso electrónico] :
_bPrinciples, Capabilities and Limits /
_cby Zheng Cui.
264 1 _aBoston, MA :
_bSpringer US,
_c2008.
300 _bonline resource.
336 _atext
_btxt
_2rdacontent
337 _acomputer
_bc
_2rdamedia
338 _arecurso en línea
_bcr
_2rdacarrier
347 _atext file
_bPDF
_2rda
505 0 _aNanofabrication by Photons -- Nanofabrication by Charged Beams -- Nanofabrication by Scanning Probes -- Nanofabrication by Replication -- Nanoscale Pattern Transfer -- Indirect Nanofabrication -- Nanofabrication by Self-Assembly.
520 _aNanofabrication: Principles, Capabilities and Limits presents a one-stop description at the introductory level on most technologies that have been developed which are capable of making structures below 100nm. Principles of each technology are introduced and illustrated with minimum mathematics involved. The capabilities of each technology in making sub-100nm structures are described. The limits of preventing a technology from further going down the dimensional scale are analyzed. Drawing upon years of practical experience and using numerous examples, Zheng Cui covers state-of-the art technologies in nanofabrication including: Photon-based lithography Charged particle beams lithography Nanofabrication using scanning probes Nanoscale replication Nanoscale pattern transfer Indirect nanofabrication Nanofabrication by self-assembly Nanofabrication: Principles, Capabilities and Limits will serve as a practical guide and first-hand reference for researchers and practitioners working in nanostructure fabrication and also provides a "tool box" of various techniques that can be easily adapted in different fields of applications. Written for: Nanoscience and nanotechnology researchers and engineers, technical professionals and academic researchers in the fields of electrtonics, mechanical engineering, and chemical engineering.
650 0 _aMATERIALS.
650 0 _aOPTICAL MATERIALS.
650 0 _aNANOTECHNOLOGY.
650 1 4 _aMATERIALS SCIENCE.
650 2 4 _aNANOTECHNOLOGY.
650 2 4 _aMATERIALS SCIENCE, GENERAL.
650 2 4 _aCONTINUUM MECHANICS AND MECHANICS OF MATERIALS.
650 2 4 _aOPTICAL AND ELECTRONIC MATERIALS.
710 2 _aSpringerLink (Online service)
773 0 _tSpringer eBooks
776 0 8 _iPrinted edition:
_z9780387755762
856 4 0 _uhttp://dx.doi.org/10.1007/978-0-387-75577-9
_zVer el texto completo en las instalaciones del CICY
912 _aZDB-2-CMS
942 _2ddc
_cER
999 _c58701
_d58701