000			04003nam a22005055i 4500
001			978-0-387-77747-4
003			DE-He213
005			20251006084416.0
007			cr nn 008mamaa
008			100301s2010 xxu| s |||| 0|eng d
020			_a9780387777474
020			_a99780387777474
024	7		_a10.1007/978-0-387-77747-4 _2doi
082	0	4	_a621.381 _223
100	1		_aLang, Jeffrey. _eeditor.
245	1	0	_aMulti-Wafer Rotating MEMS Machines _h[electronic resource] : _bTurbines, Generators, and Engines / _cedited by Jeffrey Lang.
264		1	_aBoston, MA : _bSpringer US : _bImprint: Springer, _c2010.
300			_aXIV, 454p. 604 illus., 302 illus. in color. _bonline resource.
336			_atext _btxt _2rdacontent
337			_acomputer _bc _2rdamedia
338			_aonline resource _bcr _2rdacarrier
347			_atext file _bPDF _2rda
490	1		_aMEMS Reference Shelf, _x1936-4407
505	0		_ato PowerMEMS -- System Design Considerations and Device Overview -- Materials, Structures and Packaging -- Microengine Fabrication -- Fabrication of Microscale Rotating Magnetic Machines -- High-Speed Gas Bearings for Micro-Turbomachinery -- Thermofluidics and Turbomachinery -- Motors and Generators -- Microcombustors for Rotating Machinery.
520			_aMulti-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines is an outgrowth of the MIT Micro Engine Project. This project began at the Massachusetts Institute of Technology in the Fall of 1995, and later expanded through collaborations with the Georgia Institute of Technology, the Clark Atlanta University, and the University of Maryland at College Park. The overall objective of the Micro Engine Project was to develop a small but power-dense gas turbine generator based on MEMS fabrication technologies. Thus, the project sought to develop a fuel-burning jet engine that would drive an electric generator to produce electric power for general purpose use. Along the way, the project would advance the science and engineering of many disciplines from the MEMS perspective. The Micro Engine Project was by its very nature a highly mult-disciplinary project pursuing advances in materials, structures, fabrication, combustion, heat transfer, turbomachinery, bearings and electromechanics, all at the MEMS scale. Many of these topics are addressed in this volume, including: materials structures and packaging multi-wafer MEMS fabrication and and bonding technologiesElectroplating magnetic components electroplating magnetic structures into silicon very-high-speed air bearings thermofluids and turbomachinery electric and magnetic generators combustion About The MEMs Reference Shelf: "The MEMs Reference Shelf is a series devoted to Micro-Electro-Mechanical Systems (MEMs) which combine mechanical, electrical, optical, or fluidic elements on a common microfabricated substrate to create sensors, actuators, and microsystems. The series, authored by leading MEMs practitioners, strives to provide a framework where basic principles, known methodologies and new applications are integrated in a coherent and consistent manner." STEPHEN D. SENTURIA Massachusetts Institute of Technology, Professor of Electrical Engineering, Emeritus
650		0	_aENGINEERING.
650		0	_aCOMPUTER ENGINEERING.
650		0	_aELECTRONICS.
650		0	_aSYSTEMS ENGINEERING.
650		0	_aELECTRIC ENGINEERING.
650	1	4	_aENGINEERING.
650	2	4	_aELECTRONICS AND MICROELECTRONICS, INSTRUMENTATION.
650	2	4	_aENERGY TECHNOLOGY.
650	2	4	_aCIRCUITS AND SYSTEMS.
650	2	4	_aELECTRICAL ENGINEERING.
650	2	4	_aENERGY, GENERAL.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
776	0	8	_iPrinted edition: _z9780387777467
830		0	_aMEMS Reference Shelf, _x1936-4407
856	4	0	_uhttp://dx.doi.org/10.1007/978-0-387-77747-4 _zVer el texto completo en las instalaciones del CICY
912			_aZDB-2-ENG
942			_2ddc _cER
999			_c59014 _d59014