| 000 | 00826nam a2200253Ia 4500 | ||
|---|---|---|---|
| 001 | 000009954 | ||
| 003 | MX-MdCICY | ||
| 005 | 20241009164716.0 | ||
| 008 | 070518c2012-----usa######---#000-0#eng-# | ||
| 020 | _a0132497360 (alk. paper) | ||
| 020 | _a9780132497367 (alk. paper) | ||
| 040 | _cCICY | ||
| 082 | 0 | 4 |
_a621.381 _bL58 2012 |
| 100 | 1 | _aLiu, Chang | |
| 245 | 1 | 0 |
_aFoundations of MEMS / _cChang Liu |
| 250 | _a2 ed. | ||
| 264 | 3 | 1 |
_aUpper Saddle River, NJ : _bPrentice Hall, _cc2012 |
| 300 |
_axiv, 562 p. : _bil. ; _c24 cm. |
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| 504 | _aIncluye referencias bibliográficas e índice | ||
| 650 | 1 | 4 | _aSISTEMAS MICROELECTROMECANICOS |
| 650 | 1 | 4 |
_aSISTEMAS MICROELECTROMECANICOS _xMATERIALES |
| 856 | 4 | 0 |
_uhttps://www.cicy.mx/sitios/sib/doctoelectronico/9954.pdf _zVer tabla de contenido y/o resumen |
| 942 |
_2ddc _cBK |
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| 999 |
_c9211 _d9211 |
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